Stabilization of tetragonal ZrO2 by oxygen plasma treatment of sputtered ZrCu and ZrAl thin films.

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Bibliographic Details
Title: Stabilization of tetragonal ZrO2 by oxygen plasma treatment of sputtered ZrCu and ZrAl thin films.
Authors: Eisenmenger-Sittner, C.1, Nöbauer, C.1, Mozetic, M.2, Kovač, J.2 janez.kovac@ijs.si, Zaplotnik, R.2
Source: Surface & Coatings Technology. Aug2018, Vol. 347, p270-277. 8p.
Database: Academic Search Ultimate
Description
ISSN:02578972
DOI:10.1016/j.surfcoat.2018.04.061