Stabilization of tetragonal ZrO2 by oxygen plasma treatment of sputtered ZrCu and ZrAl thin films.
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| Title: | Stabilization of tetragonal ZrO2 by oxygen plasma treatment of sputtered ZrCu and ZrAl thin films. |
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| Authors: | Eisenmenger-Sittner, C.1, Nöbauer, C.1, Mozetic, M.2, Kovač, J.2 janez.kovac@ijs.si, Zaplotnik, R.2 |
| Source: | Surface & Coatings Technology. Aug2018, Vol. 347, p270-277. 8p. |
| Database: | Academic Search Ultimate |
| ISSN: | 02578972 |
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| DOI: | 10.1016/j.surfcoat.2018.04.061 |