Selective rear-side ablation of aluminum thin layers with ultrashort-pulsed laser radiation.
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| Title: | Selective rear-side ablation of aluminum thin layers with ultrashort-pulsed laser radiation. |
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| Authors: | Viertel, Tina1 (AUTHOR) viertel1@hs-mittweida.de, Pabst, Linda1 (AUTHOR), Ebert, Robby1 (AUTHOR), Exner, Horst1 (AUTHOR) |
| Source: | Applied Physics A: Materials Science & Processing. Oct2019, Vol. 125 Issue 10, pN.PAG-N.PAG. 1p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 09478396 |
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| DOI: | 10.1007/s00339-019-3034-6 |
