APA (7th ed.) Citation

Baraban, A. P., Denisov, E. A., Dmitriev, V. A., Drozd, A. V., Drozd, V. E., Selivanov, A. A., & Seisyan, R. P. (2020). Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition. Semiconductors, 54(4), 506. https://doi.org/10.1134/S106378262004003X

Chicago Style (17th ed.) Citation

Baraban, A. P., E. A. Denisov, V. A. Dmitriev, A. V. Drozd, V. E. Drozd, A. A. Selivanov, and R. P. Seisyan. "Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition." Semiconductors 54, no. 4 (2020): 506. https://doi.org/10.1134/S106378262004003X.

MLA (9th ed.) Citation

Baraban, A. P., et al. "Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition." Semiconductors, vol. 54, no. 4, 2020, p. 506, https://doi.org/10.1134/S106378262004003X.