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Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.

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Title: Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.
Authors: Baraban, A. P.1 (AUTHOR), Denisov, E. A.1 (AUTHOR), Dmitriev, V. A.1 (AUTHOR), Drozd, A. V.1 (AUTHOR), Drozd, V. E.1 (AUTHOR) vedrozd@mail.ru, Selivanov, A. A.1 (AUTHOR), Seisyan, R. P.2 (AUTHOR)
Source: Semiconductors. Apr2020, Vol. 54 Issue 4, p506-510. 5p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 142942551
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  Data: Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.
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  Data: <searchLink fieldCode="JN" term="%22Semiconductors%22">Semiconductors</searchLink>. Apr2020, Vol. 54 Issue 4, p506-510. 5p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=142942551
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        Value: 10.1134/S106378262004003X
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      – Code: eng
        Text: English
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      – TitleFull: Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.
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              Text: Apr2020
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              Y: 2020
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