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Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.

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Bibliographic Details
Title: Features of SiO2 Layers Synthesized on Silicon by Molecular Layer Deposition.
Authors: Baraban, A. P.1 (AUTHOR), Denisov, E. A.1 (AUTHOR), Dmitriev, V. A.1 (AUTHOR), Drozd, A. V.1 (AUTHOR), Drozd, V. E.1 (AUTHOR) vedrozd@mail.ru, Selivanov, A. A.1 (AUTHOR), Seisyan, R. P.2 (AUTHOR)
Source: Semiconductors. Apr2020, Vol. 54 Issue 4, p506-510. 5p.
Database: Academic Search Ultimate
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ISSN:10637826
DOI:10.1134/S106378262004003X