A vibrating beam MEMS accelerometer for gravity and seismic measurements. - Mustafazade, Arif; Pandit, Milind; Zhao, Chun; Sobreviela, Guillermo; Du, Zhijun; Steinmann, Philipp; Zou, Xudong; Howe, Roger T.; Seshia, Ashwin A. (Scientific Reports, 2020)