Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption.

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Bibliographic Details
Title: Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption.
Authors: Li, Yi-Cheng1 (AUTHOR) yichengli@hust.edu.cn, Cao, Kun1 (AUTHOR) kuncao@mail.hust.edu.cn, Lan, Yu-Xiao2 (AUTHOR) M202070873@hust.edu.cn, Zhang, Jing-Ming2 (AUTHOR) simonzjm666@gmail.com, Gong, Miao1 (AUTHOR), Wen, Yan-Wei2 (AUTHOR) ywwen@hust.edu.cn, Shan, Bin2 (AUTHOR) bshan@mail.hust.edu.cn, Chen, Rong1 (AUTHOR) kuncao@mail.hust.edu.cn, Armini, Silvia (AUTHOR)
Source: Molecules. May2021, Vol. 26 Issue 10, p3056-3056. 1p.
Database: Academic Search Ultimate
Description
ISSN:14203049
DOI:10.3390/molecules26103056