APA (7th ed.) Citation

Hsu, C., Geng, X., Huang, P., Wu, W., Zhao, M., Zhang, X., . . . Zhu, W. (2021). High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition. Journal of Alloys & Compounds, 884, N.PAG. https://doi.org/10.1016/j.jallcom.2021.161025

Chicago Style (17th ed.) Citation

Hsu, Chia-Hsun, et al. "High Doping Efficiency Al-doped ZnO Films Prepared by Co-injection Spatial Atomic Layer Deposition." Journal of Alloys & Compounds 884 (2021): N.PAG. https://doi.org/10.1016/j.jallcom.2021.161025.

MLA (9th ed.) Citation

Hsu, Chia-Hsun, et al. "High Doping Efficiency Al-doped ZnO Films Prepared by Co-injection Spatial Atomic Layer Deposition." Journal of Alloys & Compounds, vol. 884, 2021, p. N.PAG, https://doi.org/10.1016/j.jallcom.2021.161025.