High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition.

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Title: High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition.
Authors: Hsu, Chia-Hsun1 (AUTHOR), Geng, Xin-Peng1 (AUTHOR), Huang, Pao-Hsun2 (AUTHOR), Wu, Wan-Yu3 (AUTHOR), Zhao, Ming-Jie1 (AUTHOR), Zhang, Xiao-Ying1 (AUTHOR), Huang, Qi-Hui1,4 (AUTHOR), Su, Zhan-Bo1 (AUTHOR), Chen, Zi-Rong1 (AUTHOR), Lien, Shui-Yang1,3,4 (AUTHOR) sylien@xmut.edu.cn, Zhu, Wen-Zhang1,4 (AUTHOR)
Source: Journal of Alloys & Compounds. Dec2021, Vol. 884, pN.PAG-N.PAG. 1p.
Database: Academic Search Ultimate
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  Data: High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Alloys+%26+Compounds%22">Journal of Alloys & Compounds</searchLink>. Dec2021, Vol. 884, pN.PAG-N.PAG. 1p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=151951579
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/j.jallcom.2021.161025
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      – Code: eng
        Text: English
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    Titles:
      – TitleFull: High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition.
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            NameFull: Hsu, Chia-Hsun
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            NameFull: Geng, Xin-Peng
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            NameFull: Huang, Pao-Hsun
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            NameFull: Wu, Wan-Yu
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            NameFull: Zhao, Ming-Jie
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            NameFull: Zhang, Xiao-Ying
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            NameFull: Huang, Qi-Hui
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            NameFull: Su, Zhan-Bo
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            NameFull: Chen, Zi-Rong
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            NameFull: Lien, Shui-Yang
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            NameFull: Zhu, Wen-Zhang
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          Dates:
            – D: 05
              M: 12
              Text: Dec2021
              Type: published
              Y: 2021
          Identifiers:
            – Type: issn-print
              Value: 09258388
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            – Type: volume
              Value: 884
          Titles:
            – TitleFull: Journal of Alloys & Compounds
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