High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition.
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| Title: | High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition. |
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| Authors: | Hsu, Chia-Hsun1 (AUTHOR), Geng, Xin-Peng1 (AUTHOR), Huang, Pao-Hsun2 (AUTHOR), Wu, Wan-Yu3 (AUTHOR), Zhao, Ming-Jie1 (AUTHOR), Zhang, Xiao-Ying1 (AUTHOR), Huang, Qi-Hui1,4 (AUTHOR), Su, Zhan-Bo1 (AUTHOR), Chen, Zi-Rong1 (AUTHOR), Lien, Shui-Yang1,3,4 (AUTHOR) sylien@xmut.edu.cn, Zhu, Wen-Zhang1,4 (AUTHOR) |
| Source: | Journal of Alloys & Compounds. Dec2021, Vol. 884, pN.PAG-N.PAG. 1p. |
| Database: | Academic Search Ultimate |
| ISSN: | 09258388 |
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| DOI: | 10.1016/j.jallcom.2021.161025 |
