Smart-cut-like laser slicing of GaN substrate using its own nitrogen. - Tanaka, Atsushi; Sugiura, Ryuji; Kawaguchi, Daisuke; Yui, Toshiki; Wani, Yotaro; Aratani, Tomomi; Watanabe, Hirotaka; Sena, Hadi; Honda, Yoshio; Igasaki, Yasunori; Amano, Hiroshi (Scientific Reports, 2021)