Film Thickness Determination by SEM-EDX Measurements of the Attenuation of X-Rays Generated in a Specially Designed Target.

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Bibliographic Details
Title: Film Thickness Determination by SEM-EDX Measurements of the Attenuation of X-Rays Generated in a Specially Designed Target.
Alternate Title: Determinación del Espesor de Películas mediante Mediciones con SEM-EDX de la Atenuación de Rayos-X Generados en un Blanco Especialmente Diseñado.
Authors: Rojas, C. E.1 carlosrojas1@gmail.com, Rodríguez, G.2
Source: Acta Microscopica. 2022, Vol. 31 Issue 1, p33-38. 6p.
Database: Academic Search Ultimate
Description
ISSN:07984545