Anisotropic Stresses in GaN(11‒20) Layers on an r-Al2O3 Substrate during Hydride Vapor Phase Epitaxy.

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Title: Anisotropic Stresses in GaN(11‒20) Layers on an r-Al2O3 Substrate during Hydride Vapor Phase Epitaxy.
Authors: Bessolov, V. N.1 (AUTHOR), Konenkova, E. V.1 (AUTHOR) lena@triat.ioffe.ru, Seredova, N. V.1 (AUTHOR), Panteleev, V. N.1 (AUTHOR), Scheglov, M. E.1 (AUTHOR)
Source: Semiconductors. Mar2022, Vol. 56 Issue 3, p164-168. 5p.
Database: Academic Search Ultimate
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ISSN:10637826
DOI:10.1134/S106378262202004X