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Diffusion of Germanium from a Buried SiO2 Layer and Formation of a SiGe Phase.

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Title: Diffusion of Germanium from a Buried SiO2 Layer and Formation of a SiGe Phase.
Authors: Tyschenko, I. E.1 (AUTHOR) tys@isp.nsc.ru, Khmelnitsky, R. A.2,3 (AUTHOR), Saraykin, V. V.4,5 (AUTHOR), Volodin, V. A.1,6 (AUTHOR), Popov, V. P.1 (AUTHOR)
Source: Semiconductors. Mar2022, Vol. 56 Issue 3, p215-222. 8p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 157504984
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PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Diffusion of Germanium from a Buried SiO<subscript>2</subscript> Layer and Formation of a SiGe Phase.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Tyschenko%2C+I%2E E%2E%22">Tyschenko, I. E.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> tys@isp.nsc.ru</i><br /><searchLink fieldCode="AR" term="%22Khmelnitsky%2C+R%2E A%2E%22">Khmelnitsky, R. A.</searchLink><relatesTo>2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Saraykin%2C+V%2E V%2E%22">Saraykin, V. V.</searchLink><relatesTo>4,5</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Volodin%2C+V%2E A%2E%22">Volodin, V. A.</searchLink><relatesTo>1,6</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Popov%2C+V%2E P%2E%22">Popov, V. P.</searchLink><relatesTo>1</relatesTo> (AUTHOR)
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Semiconductors%22">Semiconductors</searchLink>. Mar2022, Vol. 56 Issue 3, p215-222. 8p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=157504984
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1134/S1063782622020154
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 215
    Titles:
      – TitleFull: Diffusion of Germanium from a Buried SiO2 Layer and Formation of a SiGe Phase.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Tyschenko, I. E.
      – PersonEntity:
          Name:
            NameFull: Khmelnitsky, R. A.
      – PersonEntity:
          Name:
            NameFull: Saraykin, V. V.
      – PersonEntity:
          Name:
            NameFull: Volodin, V. A.
      – PersonEntity:
          Name:
            NameFull: Popov, V. P.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: Mar2022
              Type: published
              Y: 2022
          Identifiers:
            – Type: issn-print
              Value: 10637826
          Numbering:
            – Type: volume
              Value: 56
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Semiconductors
              Type: main
ResultId 1