Silicon interstitial injection during dry oxidation of SiGe/Si layers.
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| Title: | Silicon interstitial injection during dry oxidation of SiGe/Si layers. |
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| Authors: | Napolitani, E.1, di Marino, M.1, de Salvador, D.1, Carnera, A.1, Spadafora, M.2, Mirabella, S.2, Terrasi, A.2, Scalese, S.3 |
| Source: | Journal of Applied Physics. 2/1/2005, Vol. 97 Issue 3, p036106. 3p. 1 Black and White Photograph, 2 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1844606 |
