APA (7th ed.) Citation

Flügel-Paul, T., Heusinger, M., Gerold, K., Szeghalmi, A., & Zeitner, U. (2022). Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops. EPJ Web of Conferences, 266, 1. https://doi.org/10.1051/epjconf/202226603008

Chicago Style (17th ed.) Citation

Flügel-Paul, Thomas, Martin Heusinger, Kristin Gerold, Adriana Szeghalmi, and Uwe Zeitner. "Optical Methods for Measuring the Feature Size of Optical Diffraction Gratings with Nano-meter Accuracy and Implementation of Suitable Feedback Control Loops." EPJ Web of Conferences 266 (2022): 1. https://doi.org/10.1051/epjconf/202226603008.

MLA (9th ed.) Citation

Flügel-Paul, Thomas, et al. "Optical Methods for Measuring the Feature Size of Optical Diffraction Gratings with Nano-meter Accuracy and Implementation of Suitable Feedback Control Loops." EPJ Web of Conferences, vol. 266, 2022, p. 1, https://doi.org/10.1051/epjconf/202226603008.