Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops.
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| Title: | Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops. |
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| Authors: | Flügel-Paul, Thomas1 author@e-mail.org, Heusinger, Martin1, Gerold, Kristin1, Szeghalmi, Adriana1, Zeitner, Uwe1,2 |
| Source: | EPJ Web of Conferences. 10/13/2022, Vol. 266, p1-2. 2p. |
| Database: | Academic Search Ultimate |
| ISSN: | 21016275 |
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| DOI: | 10.1051/epjconf/202226603008 |
