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Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops.

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Title: Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops.
Authors: Flügel-Paul, Thomas1 author@e-mail.org, Heusinger, Martin1, Gerold, Kristin1, Szeghalmi, Adriana1, Zeitner, Uwe1,2
Source: EPJ Web of Conferences. 10/13/2022, Vol. 266, p1-2. 2p.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 159741600
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PubType: Conference
PubTypeId: conference
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Flügel-Paul%2C+Thomas%22">Flügel-Paul, Thomas</searchLink><relatesTo>1</relatesTo><i> author@e-mail.org</i><br /><searchLink fieldCode="AR" term="%22Heusinger%2C+Martin%22">Heusinger, Martin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Gerold%2C+Kristin%22">Gerold, Kristin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Szeghalmi%2C+Adriana%22">Szeghalmi, Adriana</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Zeitner%2C+Uwe%22">Zeitner, Uwe</searchLink><relatesTo>1,2</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22EPJ+Web+of+Conferences%22">EPJ Web of Conferences</searchLink>. 10/13/2022, Vol. 266, p1-2. 2p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=159741600
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1051/epjconf/202226603008
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 2
        StartPage: 1
    Titles:
      – TitleFull: Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Flügel-Paul, Thomas
      – PersonEntity:
          Name:
            NameFull: Heusinger, Martin
      – PersonEntity:
          Name:
            NameFull: Gerold, Kristin
      – PersonEntity:
          Name:
            NameFull: Szeghalmi, Adriana
      – PersonEntity:
          Name:
            NameFull: Zeitner, Uwe
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 13
              M: 10
              Text: 10/13/2022
              Type: published
              Y: 2022
          Identifiers:
            – Type: issn-print
              Value: 21016275
          Numbering:
            – Type: volume
              Value: 266
          Titles:
            – TitleFull: EPJ Web of Conferences
              Type: main
ResultId 1