APA (7th ed.) Citation

Zhang, L., Wang, T., & Lu, X. (2023). Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects. International Journal of Advanced Manufacturing Technology, 125(9/10), 4549. https://doi.org/10.1007/s00170-023-10824-4

Chicago Style (17th ed.) Citation

Zhang, Lifei, Tongqing Wang, and Xinchun Lu. "Research on Weakly Alkaline Bulk Slurries Relevant to Chemical Mechanical Polishing for Cobalt Interconnects." International Journal of Advanced Manufacturing Technology 125, no. 9/10 (2023): 4549. https://doi.org/10.1007/s00170-023-10824-4.

MLA (9th ed.) Citation

Zhang, Lifei, et al. "Research on Weakly Alkaline Bulk Slurries Relevant to Chemical Mechanical Polishing for Cobalt Interconnects." International Journal of Advanced Manufacturing Technology, vol. 125, no. 9/10, 2023, p. 4549, https://doi.org/10.1007/s00170-023-10824-4.