View in EDS HTML Full Text PDF Full Text

Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects.

Saved in:
Bibliographic Details
Title: Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects.
Authors: Zhang, Lifei1 (AUTHOR), Wang, Tongqing1 (AUTHOR), Lu, Xinchun1 (AUTHOR) xclu@tsinghua.edu.cn
Source: International Journal of Advanced Manufacturing Technology. Apr2023, Vol. 125 Issue 9/10, p4549-4559. 11p. 1 Color Photograph, 1 Black and White Photograph, 3 Charts, 10 Graphs.
Database: Academic Search Ultimate
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 162642095
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Zhang%2C+Lifei%22">Zhang, Lifei</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Tongqing%22">Wang, Tongqing</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lu%2C+Xinchun%22">Lu, Xinchun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> xclu@tsinghua.edu.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Advanced+Manufacturing+Technology%22">International Journal of Advanced Manufacturing Technology</searchLink>. Apr2023, Vol. 125 Issue 9/10, p4549-4559. 11p. 1 Color Photograph, 1 Black and White Photograph, 3 Charts, 10 Graphs.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=162642095
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s00170-023-10824-4
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 4549
    Titles:
      – TitleFull: Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Zhang, Lifei
      – PersonEntity:
          Name:
            NameFull: Wang, Tongqing
      – PersonEntity:
          Name:
            NameFull: Lu, Xinchun
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 08
              M: 04
              Text: Apr2023
              Type: published
              Y: 2023
          Identifiers:
            – Type: issn-print
              Value: 02683768
          Numbering:
            – Type: volume
              Value: 125
            – Type: issue
              Value: 9/10
          Titles:
            – TitleFull: International Journal of Advanced Manufacturing Technology
              Type: main
ResultId 1