Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects.
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| Title: | Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects. |
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| Authors: | Zhang, Lifei1 (AUTHOR), Wang, Tongqing1 (AUTHOR), Lu, Xinchun1 (AUTHOR) xclu@tsinghua.edu.cn |
| Source: | International Journal of Advanced Manufacturing Technology. Apr2023, Vol. 125 Issue 9/10, p4549-4559. 11p. 1 Color Photograph, 1 Black and White Photograph, 3 Charts, 10 Graphs. |
| Database: | Academic Search Ultimate |
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