Deep multilevel wet etching of fused silica glass microstructures in BOE solution. - Konstantinova, T. G.; Andronic, M. M.; Baklykov, D. A.; Stukalova, V. E.; Ezenkova, D. A.; Zikiy, E. V.; Bashinova, M. V.; Solovev, A. A.; Lotkov, E. S.; Ryzhikov, I. A.; Rodionov, I. A. (Scientific Reports, 2023)