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Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection.

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Bibliographic Details
Title:	Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection.
Authors:	Rustami, Erus^1,2 (AUTHOR), Sasagawa, Kiyotaka¹ (AUTHOR) sasagawa@ms.naist.jp, Sugie, Kenji¹ (AUTHOR), Ohta, Yasumi¹ (AUTHOR), Takehara, Hironari¹ (AUTHOR), Haruta, Makito¹ (AUTHOR), Tashiro, Hiroyuki^1,3 (AUTHOR), Ohta, Jun¹ (AUTHOR)
Source:	Sensors (14248220). Apr2023, Vol. 23 Issue 7, p3695. 12p.
Database:	Academic Search Ultimate
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