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Ion-beam assisted sputtering of titanium nitride thin films.

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Title: Ion-beam assisted sputtering of titanium nitride thin films.
Authors: Draher, Timothy1,2 (AUTHOR), Polakovic, Tomas3 (AUTHOR), Li, Juliang4 (AUTHOR), Li, Yi1 (AUTHOR), Welp, Ulrich1 (AUTHOR), Jiang, Jidong Samuel1 (AUTHOR), Pearson, John1 (AUTHOR), Armstrong, Whitney3 (AUTHOR), Meziani, Zein-Eddine3 (AUTHOR), Chang, Clarence4 (AUTHOR), Kwok, Wai-Kwong1 (AUTHOR), Xiao, Zhili1,2 (AUTHOR), Novosad, Valentine1 (AUTHOR) novosad@anl.gov
Source: Scientific Reports. 4/18/2023, Vol. 13 Issue 1, p1-8. 8p.
Database: Academic Search Ultimate
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        Value: 10.1038/s41598-023-31549-0
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