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Ion-beam assisted sputtering of titanium nitride thin films.

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Bibliographic Details
Title:	Ion-beam assisted sputtering of titanium nitride thin films.
Authors:	Draher, Timothy^1,2 (AUTHOR), Polakovic, Tomas³ (AUTHOR), Li, Juliang⁴ (AUTHOR), Li, Yi¹ (AUTHOR), Welp, Ulrich¹ (AUTHOR), Jiang, Jidong Samuel¹ (AUTHOR), Pearson, John¹ (AUTHOR), Armstrong, Whitney³ (AUTHOR), Meziani, Zein-Eddine³ (AUTHOR), Chang, Clarence⁴ (AUTHOR), Kwok, Wai-Kwong¹ (AUTHOR), Xiao, Zhili^1,2 (AUTHOR), Novosad, Valentine¹ (AUTHOR) novosad@anl.gov
Source:	Scientific Reports. 4/18/2023, Vol. 13 Issue 1, p1-8. 8p.
Database:	Academic Search Ultimate
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