High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings. - Fréchette, Luc G.; Jacobson, Stuart A.; Breuer, Kenneth S.; Ehrich, Fredric F.; Ghodssi, Reza; Khanna, Ravi; Chee Wei Wong; Xin Zhang; Schmidt, Martin A.; Epstein, Alan H. (Journal of Microelectromechanical Systems, 2005)