High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback.

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Title: High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback.
Authors: Chandrasekaran, Vigneshwaran1 (AUTHOR), Titze, Michael2 (AUTHOR) mictitz@sandia.gov, Flores, Anthony R.2 (AUTHOR), Campbell, Deanna2 (AUTHOR), Henshaw, Jacob3 (AUTHOR), Jones, Andrew C.1 (AUTHOR), Bielejec, Edward S.2 (AUTHOR), Htoon, Han1 (AUTHOR) htoon@lanl.gov
Source: Advanced Science. 6/23/2023, Vol. 10 Issue 18, p1-8. 8p.
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  Data: High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback.
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  Data: <searchLink fieldCode="JN" term="%22Advanced+Science%22">Advanced Science</searchLink>. 6/23/2023, Vol. 10 Issue 18, p1-8. 8p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=164487881
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        Value: 10.1002/advs.202300190
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        Text: English
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      – TitleFull: High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback.
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              Text: 6/23/2023
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