High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback.
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| Title: | High‐Yield Deterministic Focused Ion Beam Implantation of Quantum Defects Enabled by In Situ Photoluminescence Feedback. |
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| Authors: | Chandrasekaran, Vigneshwaran1 (AUTHOR), Titze, Michael2 (AUTHOR) mictitz@sandia.gov, Flores, Anthony R.2 (AUTHOR), Campbell, Deanna2 (AUTHOR), Henshaw, Jacob3 (AUTHOR), Jones, Andrew C.1 (AUTHOR), Bielejec, Edward S.2 (AUTHOR), Htoon, Han1 (AUTHOR) htoon@lanl.gov |
| Source: | Advanced Science. 6/23/2023, Vol. 10 Issue 18, p1-8. 8p. |
| Database: | Academic Search Ultimate |
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