Comparative X-ray Diffractometry of the Defect Structure of ZnO Epitaxial Films Deposited by Magnetron Sputtering on C-Plane Al2O3 Substrates in Inhomogeneous Electric Field.
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| Title: | Comparative X-ray Diffractometry of the Defect Structure of ZnO Epitaxial Films Deposited by Magnetron Sputtering on C-Plane Al |
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| Authors: | Volkovsky, Yu. A.1 (AUTHOR) irlandez08@yandex.ru, Zhernova, V. A.1 (AUTHOR), Folomeshkin, M. S.1 (AUTHOR), Prosekov, P. A.1 (AUTHOR), Muslimov, A. E.1 (AUTHOR), Butashin, A. V.1 (AUTHOR), Ismailov, A. M.2 (AUTHOR), Grigoriev, Yu. V.1 (AUTHOR), Pisarevsky, Yu. V.1 (AUTHOR), Kanevsky, V. M.1,3 (AUTHOR) |
| Source: | Crystallography Reports. Apr2023, Vol. 68 Issue 2, p195-202. 8p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 10637745 |
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| DOI: | 10.1134/S1063774523020219 |
