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GC-MS Investigation of Hexamethyldisiloxane-Oxygen Fed Plasmas.

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Bibliographic Details
Title: GC-MS Investigation of Hexamethyldisiloxane-Oxygen Fed Plasmas.
Authors: Fracassi, F.1 fracassi@chimica.uniba.it, d'Agostino, R.1, Fanelli, F.1 fracassi@chimica.uniba.it, Fornelli, A.1, Palumbo, F.1
Source: Plasmas & Polymers. Dec2003, Vol. 8 Issue 4, p259-269. 11p.
Database: Academic Search Ultimate
Description
ISSN:10840184
DOI:10.1023/A:1026333126452