View in EDS HTML Full Text PDF Full Text

A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.

Saved in:
Bibliographic Details
Title: A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.
Authors: Chen, Junying1 (AUTHOR) chenjunying@jmu.edu.cn, Wang, Boxuan1 (AUTHOR), Chen, Xiuyu1 (AUTHOR), Jiang, Qingshan1 (AUTHOR) 15392169726@163.com, Feng, Wei1 (AUTHOR), Xu, Zhilong1 (AUTHOR), Zhao, Zhenye1 (AUTHOR)
Source: Sensors (14248220). Oct2023, Vol. 23 Issue 19, p8307. 15p.
Database: Academic Search Ultimate
Full text is not displayed to guests.
Description
ISSN:14248220
DOI:10.3390/s23198307