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A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.

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Title: A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.
Authors: Chen, Junying1 (AUTHOR) chenjunying@jmu.edu.cn, Wang, Boxuan1 (AUTHOR), Chen, Xiuyu1 (AUTHOR), Jiang, Qingshan1 (AUTHOR) 15392169726@163.com, Feng, Wei1 (AUTHOR), Xu, Zhilong1 (AUTHOR), Zhao, Zhenye1 (AUTHOR)
Source: Sensors (14248220). Oct2023, Vol. 23 Issue 19, p8307. 15p.
Database: Academic Search Ultimate
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  Data: A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.
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  Data: <searchLink fieldCode="AR" term="%22Chen%2C+Junying%22">Chen, Junying</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> chenjunying@jmu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+Boxuan%22">Wang, Boxuan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Xiuyu%22">Chen, Xiuyu</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jiang%2C+Qingshan%22">Jiang, Qingshan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> 15392169726@163.com</i><br /><searchLink fieldCode="AR" term="%22Feng%2C+Wei%22">Feng, Wei</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Xu%2C+Zhilong%22">Xu, Zhilong</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhao%2C+Zhenye%22">Zhao, Zhenye</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%2814248220%29%22">Sensors (14248220)</searchLink>. Oct2023, Vol. 23 Issue 19, p8307. 15p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=172987445
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        Value: 10.3390/s23198307
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        Text: English
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      – TitleFull: A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.
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              Text: Oct2023
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              Y: 2023
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