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Fabrication of nanometre sized gratings via ion irradiation.

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Bibliographic Details
Title: Fabrication of nanometre sized gratings via ion irradiation.
Authors: Kaufmann, Johannes1 johannes.michael.kaufmann@uni-jena.de, Schrempel, Frank1, Zeitner, Uwe2
Source: EPJ Web of Conferences. 10/18/2023, Vol. 287, p1-2. 2p.
Database: Academic Search Ultimate
Description
ISSN:21016275
DOI:10.1051/epjconf/202328705003