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Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.

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Title: Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer.
Authors: Nakamura, Nathan1,2 (AUTHOR) paul.szypryt@nist.gov, Szypryt, Paul1,2 (AUTHOR) bradley.alpert@nist.gov, Dagel, Amber L.3 (AUTHOR) aldagel@sandia.gov, Alpert, Bradley K.1 (AUTHOR) douglas.bennett@nist.gov, Bennett, Douglas A.1 (AUTHOR) william.doriese@nist.gov, Doriese, William Bertrand1 (AUTHOR) malcolm.durkin@nist.gov, Durkin, Malcolm1,2 (AUTHOR) joe.fowler@nist.gov, Fowler, Joseph W.1,2 (AUTHOR) johnathon.gard@colorado.edu, Fox, Dylan T.3 (AUTHOR) dylfox@sandia.gov, Gard, Johnathon D.1,2 (AUTHOR) kelsey.morgan@nist.gov, Goodner, Ryan N.3 (AUTHOR) rngoodn@sandia.gov, Harris, James Zachariah3 (AUTHOR) esjimen@sandia.gov, Hilton, Gene C.1 (AUTHOR) galen.oneil@nist.gov, Jimenez, Edward S.3 (AUTHOR) blkerne@sandia.gov, Kernen, Burke L.3 (AUTHOR) dmcarth@sandia.gov, Larson, Kurt W.3 (AUTHOR) paschul@sandia.gov, Levine, Zachary H.4 (AUTHOR) zachary.levine@nist.gov, McArthur, Daniel3 (AUTHOR) krthomp@sandia.gov, Morgan, Kelsey M.1,2 (AUTHOR) nathan.ortiz@nist.gov, O'Neil, Galen C.1 (AUTHOR) carl.reintsema@nist.gov
Source: Sensors (14248220). May2024, Vol. 24 Issue 9, p2890. 17p.
Database: Academic Search Ultimate
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