APA (7th ed.) Citation

Barkby, J. W., Moro, F., Perego, M., Taglietti, F., Lidorikis, E., Kalfagiannis, N., . . . Fanciulli, M. (2024). Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping. Scientific Reports, 14(1), 1. https://doi.org/10.1038/s41598-024-69552-8

Chicago Style (17th ed.) Citation

Barkby, Josh W., Fabrizio Moro, Michele Perego, Fabiana Taglietti, Elefterios Lidorikis, Nikolaos Kalfagiannis, Demosthenes C. Koutsogeorgis, and Marco Fanciulli. "Fabrication of Nitrogen-hyperdoped Silicon by High-pressure Gas Immersion Excimer Laser Doping." Scientific Reports 14, no. 1 (2024): 1. https://doi.org/10.1038/s41598-024-69552-8.

MLA (9th ed.) Citation

Barkby, Josh W., et al. "Fabrication of Nitrogen-hyperdoped Silicon by High-pressure Gas Immersion Excimer Laser Doping." Scientific Reports, vol. 14, no. 1, 2024, p. 1, https://doi.org/10.1038/s41598-024-69552-8.