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Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping.

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Title: Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping.
Authors: Barkby, Josh W.1, Moro, Fabrizio2, Perego, Michele3, Taglietti, Fabiana2, Lidorikis, Elefterios4, Kalfagiannis, Nikolaos1,4, Koutsogeorgis, Demosthenes C.1 demosthenes.koutsogeorgis@ntu.ac.uk, Fanciulli, Marco2 marco.fanciulli@unimib.it
Source: Scientific Reports. 8/23/2024, Vol. 14 Issue 1, p1-15. 15p.
Database: Academic Search Ultimate
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An: 179235935
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  Data: Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping.
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  Data: <searchLink fieldCode="AR" term="%22Barkby%2C+Josh+W%2E%22">Barkby, Josh W.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Moro%2C+Fabrizio%22">Moro, Fabrizio</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Perego%2C+Michele%22">Perego, Michele</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Taglietti%2C+Fabiana%22">Taglietti, Fabiana</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Lidorikis%2C+Elefterios%22">Lidorikis, Elefterios</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22Kalfagiannis%2C+Nikolaos%22">Kalfagiannis, Nikolaos</searchLink><relatesTo>1,4</relatesTo><br /><searchLink fieldCode="AR" term="%22Koutsogeorgis%2C+Demosthenes+C%2E%22">Koutsogeorgis, Demosthenes C.</searchLink><relatesTo>1</relatesTo><i> demosthenes.koutsogeorgis@ntu.ac.uk</i><br /><searchLink fieldCode="AR" term="%22Fanciulli%2C+Marco%22">Fanciulli, Marco</searchLink><relatesTo>2</relatesTo><i> marco.fanciulli@unimib.it</i>
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  Data: <searchLink fieldCode="JN" term="%22Scientific+Reports%22">Scientific Reports</searchLink>. 8/23/2024, Vol. 14 Issue 1, p1-15. 15p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=179235935
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        Value: 10.1038/s41598-024-69552-8
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        Text: English
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              Text: 8/23/2024
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