Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping. - Barkby, Josh W.; Moro, Fabrizio; Perego, Michele; Taglietti, Fabiana; Lidorikis, Elefterios; Kalfagiannis, Nikolaos; Koutsogeorgis, Demosthenes C.; Fanciulli, Marco (Scientific Reports, 2024)