Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping.
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| Title: | Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping. |
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| Authors: | Barkby, Josh W.1, Moro, Fabrizio2, Perego, Michele3, Taglietti, Fabiana2, Lidorikis, Elefterios4, Kalfagiannis, Nikolaos1,4, Koutsogeorgis, Demosthenes C.1 demosthenes.koutsogeorgis@ntu.ac.uk, Fanciulli, Marco2 marco.fanciulli@unimib.it |
| Source: | Scientific Reports. 8/23/2024, Vol. 14 Issue 1, p1-15. 15p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 20452322 |
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| DOI: | 10.1038/s41598-024-69552-8 |
