Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping.
Saved in:
| Title: | Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping. |
|---|---|
| Authors: | Barkby, Josh W.1, Moro, Fabrizio2, Perego, Michele3, Taglietti, Fabiana2, Lidorikis, Elefterios4, Kalfagiannis, Nikolaos1,4, Koutsogeorgis, Demosthenes C.1 demosthenes.koutsogeorgis@ntu.ac.uk, Fanciulli, Marco2 marco.fanciulli@unimib.it |
| Source: | Scientific Reports. 8/23/2024, Vol. 14 Issue 1, p1-15. 15p. |
| Database: | Academic Search Ultimate |
|
Full text is not displayed to guests.
Login for full access.
|
|
Be the first to leave a comment!
