Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia. - Ermakova, E. N.; Maksimovsky, E. A.; Fedorenko, A. D.; Shapovalova, A. A.; Khizhnyak, E. A.; Kosinova, M. L. (Journal of Structural Chemistry, 2024)