Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets. - Lopatin, A. Ya.; Luchin, V. I.; Nachay, A. N.; Perekalov, A. A.; Pestov, A. E.; Salashchenko, N. N.; Soloviev, A. A.; Tsybin, N. N.; Chkhalo, N. I. (Technical Physics, 2024)