In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method.
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| Title: | In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method. |
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| Authors: | Gushenets, V. I.1 (AUTHOR), Bugaev, A. S.1 (AUTHOR), Vizir, A. V.1 (AUTHOR), Oks, E. M.1,2 (AUTHOR), Nikolaev, A. G.1 (AUTHOR) nik@opee.hcei.tsc.ru, Yushkov, G. Yu.1 (AUTHOR) |
| Source: | Technical Physics. Jul2024, Vol. 69 Issue 7, p1967-1972. 6p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 10637842 |
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| DOI: | 10.1134/S1063784224070156 |
