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In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method.

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Title: In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method.
Authors: Gushenets, V. I.1 (AUTHOR), Bugaev, A. S.1 (AUTHOR), Vizir, A. V.1 (AUTHOR), Oks, E. M.1,2 (AUTHOR), Nikolaev, A. G.1 (AUTHOR) nik@opee.hcei.tsc.ru, Yushkov, G. Yu.1 (AUTHOR)
Source: Technical Physics. Jul2024, Vol. 69 Issue 7, p1967-1972. 6p.
Database: Academic Search Ultimate
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  Data: In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method.
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  Data: <searchLink fieldCode="JN" term="%22Technical+Physics%22">Technical Physics</searchLink>. Jul2024, Vol. 69 Issue 7, p1967-1972. 6p.
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        Value: 10.1134/S1063784224070156
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      – Code: eng
        Text: English
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        StartPage: 1967
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      – TitleFull: In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method.
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              Text: Jul2024
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              Y: 2024
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