Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 †.
Saved in:
| Title: | Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 †. |
|---|---|
| Authors: | Sapienza, Sergio1 (AUTHOR) sapienza@bo.imm.cnr.it, Belsito, Luca1 (AUTHOR) ferri@bo.imm.cnr.it, Ferri, Matteo1 (AUTHOR) elmi@bo.imm.cnr.it, Elmi, Ivan1 (AUTHOR) roncaglia@bo.imm.cnr.it, Zielinski, Marcin2 (AUTHOR) marcin.zielinski@soitec.com, La Via, Francesco3 (AUTHOR) francesco.lavia@imm.cnr.it, Roncaglia, Alberto1 (AUTHOR) |
| Source: | Proceedings (2504-3900). 2024, Vol. 97 Issue 1, p44. 3p. |
| Database: | Academic Search Ultimate |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 25043900 |
|---|---|
| DOI: | 10.3390/proceedings2024097044 |
