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Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 †.

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Title: Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 †.
Authors: Sapienza, Sergio1 (AUTHOR) sapienza@bo.imm.cnr.it, Belsito, Luca1 (AUTHOR) ferri@bo.imm.cnr.it, Ferri, Matteo1 (AUTHOR) elmi@bo.imm.cnr.it, Elmi, Ivan1 (AUTHOR) roncaglia@bo.imm.cnr.it, Zielinski, Marcin2 (AUTHOR) marcin.zielinski@soitec.com, La Via, Francesco3 (AUTHOR) francesco.lavia@imm.cnr.it, Roncaglia, Alberto1 (AUTHOR)
Source: Proceedings (2504-3900). 2024, Vol. 97 Issue 1, p44. 3p.
Database: Academic Search Ultimate
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An: 182565906
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  Data: Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonators with Q-Factor above 250,000 †.
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  Data: <searchLink fieldCode="AR" term="%22Sapienza%2C+Sergio%22">Sapienza, Sergio</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> sapienza@bo.imm.cnr.it</i><br /><searchLink fieldCode="AR" term="%22Belsito%2C+Luca%22">Belsito, Luca</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> ferri@bo.imm.cnr.it</i><br /><searchLink fieldCode="AR" term="%22Ferri%2C+Matteo%22">Ferri, Matteo</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> elmi@bo.imm.cnr.it</i><br /><searchLink fieldCode="AR" term="%22Elmi%2C+Ivan%22">Elmi, Ivan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> roncaglia@bo.imm.cnr.it</i><br /><searchLink fieldCode="AR" term="%22Zielinski%2C+Marcin%22">Zielinski, Marcin</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> marcin.zielinski@soitec.com</i><br /><searchLink fieldCode="AR" term="%22La+Via%2C+Francesco%22">La Via, Francesco</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> francesco.lavia@imm.cnr.it</i><br /><searchLink fieldCode="AR" term="%22Roncaglia%2C+Alberto%22">Roncaglia, Alberto</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Proceedings+%282504-3900%29%22">Proceedings (2504-3900)</searchLink>. 2024, Vol. 97 Issue 1, p44. 3p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=182565906
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        Value: 10.3390/proceedings2024097044
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              Text: 2024
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