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Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.

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Bibliographic Details
Title: Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.
Authors: Sulyaeva, V. S.1 (AUTHOR), Syrokvashin, M. M.1 (AUTHOR), Kozhevnikov, A. K.1 (AUTHOR), Ermakova, E. N.1 (AUTHOR) ermakova@niic.nsc.ru
Source: Inorganic Materials. Jun2024, Vol. 60 Issue 6, p723-730. 8p.
Database: Academic Search Ultimate
Description
ISSN:00201685
DOI:10.1134/S0020168524700948