View in EDS PDF Full Text

Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.

Saved in:
Bibliographic Details
Title: Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.
Authors: Sulyaeva, V. S.1 (AUTHOR), Syrokvashin, M. M.1 (AUTHOR), Kozhevnikov, A. K.1 (AUTHOR), Ermakova, E. N.1 (AUTHOR) ermakova@niic.nsc.ru
Source: Inorganic Materials. Jun2024, Vol. 60 Issue 6, p723-730. 8p.
Database: Academic Search Ultimate
FullText Links:
  – Type: pdflink
Text:
  Availability: 0
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 183578145
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Sulyaeva%2C+V%2E+S%2E%22">Sulyaeva, V. S.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Syrokvashin%2C+M%2E+M%2E%22">Syrokvashin, M. M.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kozhevnikov%2C+A%2E+K%2E%22">Kozhevnikov, A. K.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ermakova%2C+E%2E+N%2E%22">Ermakova, E. N.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> ermakova@niic.nsc.ru</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Inorganic+Materials%22">Inorganic Materials</searchLink>. Jun2024, Vol. 60 Issue 6, p723-730. 8p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=183578145
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1134/S0020168524700948
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 723
    Titles:
      – TitleFull: Growth of TiSiN Films by Room-Temperature Reactive Magnetron Sputtering.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Sulyaeva, V. S.
      – PersonEntity:
          Name:
            NameFull: Syrokvashin, M. M.
      – PersonEntity:
          Name:
            NameFull: Kozhevnikov, A. K.
      – PersonEntity:
          Name:
            NameFull: Ermakova, E. N.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: Jun2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 00201685
          Numbering:
            – Type: volume
              Value: 60
            – Type: issue
              Value: 6
          Titles:
            – TitleFull: Inorganic Materials
              Type: main
ResultId 1