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Area‐Selective Atomic Layer Deposition on Homogeneous Substrate for Next‐Generation Electronic Devices.

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Bibliographic Details
Title: Area‐Selective Atomic Layer Deposition on Homogeneous Substrate for Next‐Generation Electronic Devices.
Authors: Rhee, Min‐Jeong1 (AUTHOR), Won, Byoungjun1 (AUTHOR), Lim, Young‐Jin1 (AUTHOR), Song, Jeong‐Gyu2 (AUTHOR), Kim, Sunghyun2 (AUTHOR), Oh, Il‐Kwon1,3 (AUTHOR) ikoh@ajou.ac.kr
Source: Advanced Science. 6/12/2025, Vol. 12 Issue 22, p1-11. 11p.
Database: Academic Search Ultimate
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ISSN:21983844
DOI:10.1002/advs.202414483