APA (7th ed.) Citation

Bertelson, S., Dailey, R., Kim, J., & Djurdjanovic, D. (2025). Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals. International Journal of Advanced Manufacturing Technology, 138(11), 5137. https://doi.org/10.1007/s00170-025-15788-1

Chicago Style (17th ed.) Citation

Bertelson, Samuel, Roberto Dailey, Jinki Kim, and Dragan Djurdjanovic. "Virtual Metrology of Critical Dimensions in Etch Processes Based on Automated Dynamics–inspired Analysis of Complete Tool Signals." International Journal of Advanced Manufacturing Technology 138, no. 11 (2025): 5137. https://doi.org/10.1007/s00170-025-15788-1.

MLA (9th ed.) Citation

Bertelson, Samuel, et al. "Virtual Metrology of Critical Dimensions in Etch Processes Based on Automated Dynamics–inspired Analysis of Complete Tool Signals." International Journal of Advanced Manufacturing Technology, vol. 138, no. 11, 2025, p. 5137, https://doi.org/10.1007/s00170-025-15788-1.