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Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals.

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Title: Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals.
Authors: Bertelson, Samuel1 (AUTHOR) sam.bertelson@utexas.edu, Dailey, Roberto2 (AUTHOR) dailey.roberto@utexas.edu, Kim, Jinki3 (AUTHOR) jk.neo.kim@samsung.com, Djurdjanovic, Dragan1,2 (AUTHOR) dragand@me.utexas.edu
Source: International Journal of Advanced Manufacturing Technology. Jun2025, Vol. 138 Issue 11, p5137-5147. 11p.
Database: Academic Search Ultimate
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  Data: Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals.
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  Data: <searchLink fieldCode="AR" term="%22Bertelson%2C+Samuel%22">Bertelson, Samuel</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> sam.bertelson@utexas.edu</i><br /><searchLink fieldCode="AR" term="%22Dailey%2C+Roberto%22">Dailey, Roberto</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> dailey.roberto@utexas.edu</i><br /><searchLink fieldCode="AR" term="%22Kim%2C+Jinki%22">Kim, Jinki</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> jk.neo.kim@samsung.com</i><br /><searchLink fieldCode="AR" term="%22Djurdjanovic%2C+Dragan%22">Djurdjanovic, Dragan</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> dragand@me.utexas.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Advanced+Manufacturing+Technology%22">International Journal of Advanced Manufacturing Technology</searchLink>. Jun2025, Vol. 138 Issue 11, p5137-5147. 11p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=185991857
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        Value: 10.1007/s00170-025-15788-1
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      – Code: eng
        Text: English
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            NameFull: Kim, Jinki
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              Text: Jun2025
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              Y: 2025
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              Value: 138
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